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Reference Guide Страница: 5

Fluke 971 [5/32] Cleanroom particle concentrations the above table presents airborne particle limits for cleanroom applica tions per federal std 209e and iso 14644 standards the number of particles per cubic meter represent the maximum concentration limits for par ticles equal to and larger than the size

For more product information and detailed speciﬁcations, go to www.ﬂuke.com

Feature Description

6 size channels 0.3, 0.5, 1.0, 2.0, 5.0, 10.0 µm

Flow rate 0.1 cfm (2.83 L/min) controlled by internal pump

Count modes Concentration, totalize, audio

Counting efﬁciency 50 % @ 0.3 µm; 100 % for particles > 0.45 µm (per JIS B9921:1997)

Zero count 1 count/5 minute (JIS B9921:1997)

Coincidence loss 5 % at 2,000,000 particles per ft

Relative humidity ± 7 %, 20 % to 90 % non-condensing

Temperature ± 3 °C, 10 °C to 40 °C (50 °F to 104 °F)

Data storage 5000 sample records (rotating buffer) of date, time, counts, relative

humidity, temperature, sample volumes, alarms, and label

Alarms Counts, low battery, sensor fail

Delay time 0 to 24 hours

Sample inlet Isokinetic probe

Interface RS-232 and RS-485 via RJ-45

Environmental Operating: 10 °C to 40 °C (50 °F to 104 °F), 20 % to 90 % relative

humidity, non-condensing

Storage: -10 °C to 50 °C (14 °F to 122 °F), up to 90 % relative humidity,

non-condensing

Summary speciﬁcations

Growing your business

through indoor air quality

particulate proﬁling

You’ve probably heard mold referred to

as the “new asbestos”

for HVAC/R.

Concern about

mold and its health

effects is driv-

ing consumers to

have their indoor

air quality (IAQ)

situation assessed

and, if necessary,

repaired.

If you’re the

contractor they

call, keep in mind

that mold isn’t the

only issue to consider when assess-

ing the IAQ of a commercial building

or residence. Many different kinds of

particulates in a work or living environ-

ment can cause Sick Building Syndrome

and aggravate allergy and respiratory

conditions. Read a detailed application

note on www.fluke.com/iaq

Summary of cleanroom classification standards

Class Number of Particles per Cubic Meter by Micrometer Size

Federal Std 209E ISO 14644 0.1 µm 0.2 µm 0.3 µm 0.5 µm 1 µm 5 µm

ISO 1 10 2

ISO 2 100 24 10 4

1 M1.5 ISO 3 1,000 237 102 35 8

10 M2.5 ISO 4 10,000 2,370 1,020 352 83

100 M3.5 ISO 5 100,000 23,700 10,200 3,520 832 29

1,000 M4.5 ISO 6 1,000,000 237,000 102,000 35,200 8,320 293

10,000 M5.5 ISO 7 352,000 83,200 2,930

100,000 M6.5 ISO 8 3,520,000 832,000 29,300

ISO 9 35,200,000 8,320,000 293,000

Cleanroom particle concentrations

The above table presents airborne

particle limits for cleanroom applica-

tions per Federal Std 209E and ISO

14644 standards. The number of

particles per cubic meter represent the

maximum concentration limits for par-

ticles equal to and larger than the size

tested for. For example, an ISO class

5 cleanroom certiﬁed at 0.3 microns

should have no more than 10,200

particles 0.3 microns and larger. There

are other requirements regarding

sample volumes, locations and proce-

dures that must be adhered to. Refer to

the applicable cleanroom standard for

more information.

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6IRUSES

Common airborne particles and their sizes.

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